Semiconductor device

ABSTRACT

A method for bypassing a defective through silicon via x in a group of n adjacent through silicon vias, includes receiving a plurality of relief signals to identify the defective through silicon via x, activating x−1 switch circuits to connect x−1 data circuits to through silicon vias 1 to x−1 in the group of n adjacent through silicon vias, activating n−x switch circuits to connect n−x data circuits to through silicon vias x+1 to n in the group of n adjacent through silicon vias, and activating a switch circuit to connect a data circuit to an auxiliary through silicon via which is adjacent through silicon via n in the group of n adjacent through silicon vias.

RELATED APPLICATIONS

The present application is a Continuation application of U.S. patentapplication Ser. No. 14/325,436, which was filed on Jul. 8, 2014, whichis a Continuation application of U.S. patent application Ser. No.13/872,553 (Now U.S. Pat. No. 8,839,161) which is a Continuationapplication of U.S. patent application Ser. No. 12/923,800 (Now U.S.Pat. No. 8,584,061), which claims priority from Japanese PatentApplication No. 2009-235488, filed on Oct. 9, 2009, which areincorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device, and moreparticularly relates to a semiconductor device including a plurality ofsemiconductor chips electrically connected by through silicon vias.

2. Description of Related Art

A memory capacity required in semiconductor memory devices such as DRAM(Dynamic Random Access Memory) is increasing every year. In recentyears, there has been proposed a method to meet this requirement. Inthis method, a plurality of memory chips are stacked and electricallyconnected via through silicon vias arranged on a silicon substrate (seeJapanese Patent Application Laid-open No. 2007-158237).

Specifically, in a semiconductor memory device in which an interfacechip having front end units such as interface circuits incorporatedthereon and a core chip having back end units such as memory coresincorporated thereon are stacked, because read data that is read inparallel from the memory cores is supplied as it is to the interfacechip without performing serial conversion, a large number of throughsilicon vias (approximately 4000 units in some cases) are required.However, the entire chip becomes defective when even one of the throughsilicon vias becomes defective, and if a plurality of the chips arestacked, all the chips become defective. Thus, to prevent the entirechip from becoming defective due to a defective through silicon via,auxiliary through silicon vias are sometimes provided in suchsemiconductor memory devices.

In the semiconductor device disclosed in Japanese Patent ApplicationLaid-open No. 2007-158237, one auxiliary through silicon via isallocated to a group of through silicon vias constituted by a pluralityof through silicon vias (for example, eight through silicon vias).

However, when a defective through silicon via is simply replaced with anauxiliary through silicon via, an unignorable difference in wiringlengths can occur between signal paths before and after replacement ofthe through silicon vias depending on a location of the defectivethrough silicon via. That is, for example, when a defect occurs to athrough silicon via that is located near the auxiliary through siliconvia, a difference in wiring lengths between signal paths before andafter replacement of the through silicon vias is very small. However,when a defect occurs to a through silicon via that is located away fromthe auxiliary through silicon via, a signal path after replacement ofthe through silicon vias is longer by an amount equivalent to detouringof a signal path up to the auxiliary through silicon via. Such adifference in the wiring lengths can generate skew in a signal inputinto and/or output from the through silicon via. The skew can degradethe signal quality.

This problem is not limited to semiconductor memory devices such asDRAMs, but can occur to all semiconductor devices that include aplurality of semiconductor chips that are electrically connected to eachother via through silicon vias.

SUMMARY

In one embodiment, there is provided a semiconductor device comprising:a first semiconductor chip that includes 1^(st) to n^(th) drivercircuits and an output switching circuit; a second semiconductor chipthat includes 1^(st) to n^(th) receiver circuits and an input switchingcircuit; and 1^(st) to n+m^(th) through silicon vias provided on atleast one of the first and second semiconductor chips, wherein theoutput switching circuit selectively connects each of the 1^(st) ton^(th) driver circuits to different ones of the 1^(st) to n+m^(th)through silicon vias by connecting an i^(th) driver circuit to one ofi^(th) to i+m^(th) through silicon vias, where i is an integer among 1to n, and the input switching circuit selectively connects each of the1^(st) to n^(th) receiver circuits to different ones of the 1^(st) ton+m^(th) through silicon vias by connecting an i^(th) receiver circuitto one of i^(th) to i+m^(th) through silicon vias.

According to the present invention, a defective through silicon via isnot simply replaced by an auxiliary through silicon via, but thedefective through silicon via is bypassed by shifting a connectionrelation between driver circuits and the through silicon vias and aconnection relation between receiver circuits and the through siliconvias can be flexibly switched. Therefore, almost no difference in wiringlengths occurs between signal paths before and after replacement of thethrough silicon vias. Thus, because almost no skew is generated, thesignal quality can be enhanced.

BRIEF DESCRIPTION OF THE DRAWINGS

The above features and advantages of the present invention will be moreapparent from the following description of certain preferred embodimentstaken in conjunction with the accompanying drawings, in which:

FIG. 1 is a schematic cross-sectional view for explaining the structureof a semiconductor memory device 10 according to the preferredembodiment of the present invention;

FIGS. 2A to 2C are diagram showing the various types of through siliconvia TSV provided in a core chip;

FIG. 3 is a cross-sectional view showing the structure of the throughsilicon via TSV1 of the type shown in FIG. 2A;

FIG. 4 is a schematic circuit diagram showing a first embodiment of thepresent invention, and shows a state where none of the through siliconvias is defective;

FIG. 5 is showing a first embodiment of the present invention, and showsa state where a defect is generated in the through silicon via 306;

FIG. 6 is a circuit diagram showing in further detail a portion of theoutput switching circuit 120;

FIG. 7 is a schematic diagram showing a connection relation between theinterface chip IF and the core chips CC0 to CC7;

FIG. 8 is a schematic circuit diagram showing a second embodiment of thepresent invention, and shows a case where the through silicon vias 302and 304 are defective;

FIG. 9 is a circuit diagram showing in further detail a portion of theoutput switching circuits 130 and 140; and

FIG. 10 is a block diagram showing the circuit configuration of thesemiconductor memory device 10.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Preferred embodiments of the present invention will be explained belowin detail with reference to the accompanying drawings.

FIG. 1 is a schematic cross-sectional view provided to explain thestructure of a semiconductor memory device 10 according to the preferredembodiment of the present invention.

As shown in FIG. 1, the semiconductor memory device 10 according to thisembodiment has the structure where 8 core chips CC0 to CC7 that have thesame function and structure and are manufactured using the samemanufacture mask, an interface chip IF that is manufactured using amanufacture mask different from that of the core chips and an interposerIP are laminated. The core chips CC0 to CC7 and the interface chip IFare semiconductor chips using a silicon substrate and are electricallyconnected to adjacent chips in a vertical direction through pluralthrough silicon vias TSV penetrating the silicon substrate. Meanwhile,the interposer IP is a circuit board that is made of a resin, and pluralexternal terminals (solder balls) SB are formed in a back surface IPb ofthe interposer IP.

Each of the core chips CC0 to CC7 is a semiconductor chip which consistsof circuit blocks other than a so-called front end unit (front endfunction) performing a function of an interface with an external devicethrough an external terminal among circuit blocks included in a 1 GbDDR3 (Double Data Rate 3)-type SDRAM (Synchronous Dynamic Random AccessMemory). The SDRAM is a well-known and common memory chip that includesthe front end unit and a so-called back end unit having a plural memorycells and accessing to the memory cells. The SDRAM operates even as asingle chip and is capable to communicate directly with a memorycontroller. That is, each of the core chips CC0 to CC7 is asemiconductor chip where only the circuit blocks belonging to the backend unit are integrated in principle. As the circuit blocks that areincluded in the front end unit, a parallel-serial converting circuit(data latch circuit) that performs parallel/serial conversion oninput/output data between a memory cell array and a data input/outputterminal and a DLL (Delay Locked Loop) circuit that controlsinput/output timing of data are exemplified, which will be described indetail below. The interface chip IF is a semiconductor chip in whichonly the front end unit is integrated. Accordingly, an operationfrequency of the interface chip is higher than an operation frequency ofthe core chip. Since the circuits that belong to the front end unit arenot included in the core chips CC0 to CC7, the core chips CC0 to CC7cannot be operated as the single chips, except for when the core chipsare operated in a wafer state for a test operation in the course ofmanufacturing the core chips. The interface chip IF is needed to operatethe core chips CC0 to CC7. Accordingly, the memory integration of thecore chips is denser than the memory integration of a general singlechip. In the semiconductor memory device 10 according to thisembodiment, the interface chip has a front end function forcommunicating with the external device at a first operation frequency,and the plural core chips have a back end function for communicatingwith only the interface chip at a second operation frequency lower thanthe first operation frequency. Accordingly, each of the plural corechips includes a memory cell array that stores plural information, and abit number of plural read data for each I/O (DQ) that are supplied fromthe plural core chips to the interface chip in parallel is plural andassociated with a one-time read command provided from the interface chipto the core chips. In this case, the plural bit number corresponds to aprefetch data number to be well-known.

The interface chip IF functions as a common front end unit for the eightcore chips CC0 to CC7. Accordingly, all external accesses are performedthrough the interface chip IF and inputs/outputs of data are alsoperformed through the interface chip IF. In this embodiment, theinterface chip IF is disposed between the interposer IP and the corechips CC0 to CC7. However, the position of the interface chip IF is notrestricted in particular, and the interface chip IF may be disposed onthe core chips CC0 to CC7 and may be disposed on the back surface IPb ofthe interposer IP. When the interface chip IF is disposed on the corechips CC0 to CC7 in a face-down manner or is disposed on the backsurface IPb of the interposer IP in a face-up manner, the throughsilicon via TSV does not need to be provided in the interface chip IF.The interface chip IF may be disposed to be interposed between the twointerposers IP.

The interposer IP functions as a rewiring substrate to increase anelectrode pitch and secures mechanical strength of the semiconductormemory device 10. That is, an electrode 91 that is formed on a topsurface IPa of the interposer IP is drawn to the back surface IPb via athrough-hole electrode 92 and the pitch of the external terminals SB isenlarged by the rewiring layer 93 provided on the back surface IPb. InFIG. 1, only the two external terminals SB are shown. In actuality,however, three or more external terminals are provided. The layout ofthe external terminals SB is the same as that of the DDR3-type SDRAMthat is determined by the regulation. Accordingly, the semiconductormemory device can be treated as one DDR3-type SDRAM from the externalcontroller.

As shown in FIG. 1, a top surface of the uppermost core chip CC0 iscovered by an NCF (Non-Conductive Film) 94 and a lead frame 95. Gapsbetween the core chips CC0 to CC7 and the interface chip IF are filledwith an underfill 96 and surrounding portions of the gaps are covered bya sealing resin 97. Thereby, the individual chips are physicallyprotected.

When most of the through silicon vias TSV provided in the core chips CC0to CC7 are two-dimensionally viewed from a lamination direction, thatis, viewed from an arrow A shown in FIG. 1, the through silicon vias TSVare short-circuited from the through silicon vias TSV of other layersprovided at the same position. That is, as shown in FIG. 2A, thevertically disposed through silicon vias TSV1 that are provided at thesame position in plain view are short-circuited, and one wiring line isconfigured by the through silicon via TSV1. The through silicon via TSV1that are provided in the core chips CC0 to CC7 are connected to internalcircuits 4 in the core chips, respectively. Accordingly, input signals(command signal, address signal, etc.) that are supplied from theinterface chip IF to the through silicon vias TSV1 shown in FIG. 2A arecommonly input to the internal circuits 4 of the core chips CC0 to CC7.Output signals (data etc.) that are supplied from the core chips CC0 toCC7 to the through silicon via TSV1 are wired-ORed and input to theinterface chip IF.

Meanwhile, as shown in FIG. 2B, the a part of through silicon vias TSVare not directly connected to the through silicon via TSV2 of otherlayers provided at the same position in plain view but are connected tothe through silicon via TSV2 of other layers through the internalcircuits 5 provided in the core chips CC0 to CC7. That is, the internalcircuits 5 that are provided in the core chips CC0 to CC7 arecascade-connected through the through silicon via TSV2. This kind ofthrough silicon via TSV2 is used to sequentially transmit predeterminedinformation to the internal circuits 5 provided in the core chips CC0 toCC7. As this information, layer address information to be describedbelow is exemplified.

Another group of through silicon vias TSV is short-circuited from theTSVs of other layer provided at the different position in plan view, asshown in FIG. 2C. With respect to this kind of group of through siliconvia TSV3, internal circuits 6 of the core chips CC0 to CC7 are connectedto the through silicon via TSV3 a provided at the predetermined positionP in plain view. Thereby, information can be selectively input to theinternal circuits 6 provided in the core chips. As this information,defective chip information to be described below is exemplified.

As such, as types of the through silicon vias TSV provided in the corechips CC0 to CC7, three types (TSV1 to TSV3) shown in FIGS. 2A to 2Cexist. As described above, most of the through silicon vias TSV are of atype shown in FIG. 2A, and an address signal, a command signal, and aclock signal are supplied from the interface chip IF to the core chipsCC0 to CC7, through the through silicon via TSV1 of the type shown inFIG. 2A. Read data and write data are input to and output from theinterface chip IF through the through silicon via TSV1 of the type shownin FIG. 2A. Meanwhile, the through silicon vias TSV2 and TSV3 of thetypes shown in FIGS. 2B and 2C are used to provide individualinformation to the core chips CC0 to CC7 having the same structure.

FIG. 3 is a cross-sectional view showing the structure of the throughsilicon via TSV1 of the type shown in FIG. 2A.

As shown in FIG. 3, the through silicon via TSV1 is provided topenetrate a silicon substrate 80 and an interlayer insulating film 81provided on a surface of the silicon substrate 80. Around the throughsilicon via TSV1, an insulating ring 82 is provided. Thereby, thethrough silicon via TSV1 and a transistor region are insulated from eachother. In an example shown in FIG. 3, the insulating ring 82 is provideddouble. Thereby, capacitance between the through silicon via TSV1 andthe silicon substrate 80 is reduced.

An end 83 of the through silicon via TSV1 at the back surface of thesilicon substrate 80 is covered by a back surface bump 84. The backsurface bump 84 is an electrode that contacts a surface bump 85 providedin a core chip of a lower layer. The surface bump 85 is connected to anend 86 of the through silicon via TSV1, through plural pads PO to P3provided in wiring layers L0 to L3 and plural through-hole electrodesTH1 to TH3 connecting the pads to each other. Thereby, the surface bump85 and the back surface bump 84 that are provided at the same positionin plain view are short-circuited. Connection with internal circuits(not shown in the drawings) is performed through internal wiring lines(not shown in the drawings) drawn from the pads PO to P3 provided in thewiring layers L0 to L3.

A relief method that is used when a defect occurs to a through siliconvia is explained below. The relief method explained below can be appliedto any type of the through silicon vias TSV1 to TSV3 explained above.

FIG. 4 is a schematic circuit diagram for explaining a connectionrelation between the interface chip IF and the core chips CC0 to CC7according to a first embodiment of the present invention. FIG. 4 shows astate where none of the through silicon vias is defective.

In FIG. 4, as an example, there is shown a portion where 8-bit data D1to D8 is supplied from the interface chip IF to each of the core chipsCC0 to CC7. The data D1 to D8 are signals that need to be simultaneouslyoutput from the interface chip IF and simultaneously input into each ofthe core chips CC0 to CC7. Address signals and write data are examplesof such data.

As shown in FIG. 4, the interface chip IF includes eight driver circuits101 to 108 corresponding to the data D1 to D8, and each of the corechips CC0 to CC7 includes eight receiver circuits 201 to 208corresponding to the data D1 to D8. Meanwhile, in the first embodiment,nine (8+1) through silicon vias 301 to 309 are prepared to connect thedriver circuits 101 to 108 to the receiver circuits 201 to 208. Amongthe through silicon vias 301 to 309, the through silicon via 309 is anauxiliary through silicon via, and the through silicon via 309 is notused unless any of the other through silicon vias 301 to 308 isdefective.

To explain specifically, the interface chip IF includes an outputswitching circuit 120 that connects an output terminal of each of thedriver circuits 101 to 108 to one of the two corresponding throughsilicon vias via driver circuits 111 to 119. “Two corresponding throughsilicon vias” means an i-th through silicon via and an (i+1)-th throughsilicon via when a last digit of a reference number of the drivercircuits 101 to 108 is taken as i (i is a value among 1 to 8). Forexample, a first through silicon via 301 and a second through siliconvia 302 correspond to the driver circuit 101, and the through siliconvia 302 and a third through silicon via 303 correspond to the drivercircuit 102. Thus, some of the through silicon vias, that is, thethrough silicon vias 302 to 308, correspond to two driver circuits.However, two driver circuits are never connected to the same throughsilicon via. Thus, a connection to each through silicon via is performedexclusively. Which one of the two corresponding through silicon vias isto be selected is decided by relief signals R1 to R8.

The relief signals R1 to R8 are allocated to the through silicon vias301 to 308, respectively. One of the relief signals R1 to R8 isactivated when a corresponding through silicon via is defective.Assuming that a relief signal Rx is activated, an i-th through siliconvia is selected for a driver circuit whose last digit of a referencenumber is 1 to x−1, and an (i+1)-th through silicon via is selected fora driver circuit whose last digit of a reference number is x to 8. Inthe example shown in FIG. 4, none of the relief signals R1 to R8 isactive, and thus the output switching circuit 120 connects the outputterminals of the driver circuits 101 to 108 to the through silicon vias301 to 308 via the driver circuits 111 to 118, respectively.

The same connection relation holds true on a core chips CC0 to CC7 side.Specifically, each of the core chips CC0 to CC7 includes an inputswitching circuit 220, and as shown in the example of FIG. 4, when noneof the relief signals R1 to R8 is active, the input switching circuit220 connects input terminals of the receiver circuits 201 to 208 to thethrough silicon vias 301 to 308 via receiver circuits 211 to 218,respectively.

In this manner, when none of the through silicon vias 301 to 308 isdefective, each of the driver circuits is connected to corresponding oneof the receiver circuits via a path PA, and the auxiliary throughsilicon via 309 is not used.

On the other hand, when one of the through silicon vias 301 to 308becomes defective, the through silicon via 309 is used. The defectivethrough silicon via is not simply replaced by the through silicon via309; however, a connection relation among the through silicon vias 301to 308 and the driver circuits 101 to 108 and a connection relationamong the through silicon vias 301 to 308 and the receiver circuits 201to 208 are shifted with the defective through silicon via as a boundary.

FIG. 5 is a schematic circuit diagram of a state where a defect isgenerated in the through silicon via 306.

As shown in FIG. 5, the relief signal R6 is activated when a defect isgenerated in the through silicon via 306. As a result, the outputswitching circuit 120 connects the output terminals of the drivercircuits 101 to 105 to the through silicon vias 301 to 305 via thedriver circuits 111 to 115, respectively, and connects the outputterminals of the driver circuits 106 to 108 to the through silicon vias307 to 309 via the driver circuits 117 to 119, respectively. In thismanner, a connection relation among the through silicon vias 301 to 309and the driver circuits 101 to 108 is shifted with the defective throughsilicon via as a boundary.

The same connection relation holds true even on the core chips CC0 toCC7 side. That is, the input switching circuit 220 connects, in responseto activation of the relief signal R6, the input terminals of thereceiver circuits 201 to 205 to the through silicon vias 301 to 305 viathe receiver circuits 211 to 215, respectively, and connects the inputterminals of the receiver circuits 206 to 208 to the through siliconvias 307 to 309 via the receiver circuits 217 to 219, respectively. Inthis manner, even on the input side, a connection relation among thethrough silicon vias 301 to 309 and the receiver circuits 201 to 208 isshifted with the defective through silicon via as a boundary.

In this manner, when the through silicon via 306 is defective, thedriver circuits 101 to 105 are connected to the receiver circuits 201 to205, respectively, via the path PA; however, the driver circuits 106 to108 are connected to the receiver circuits 206 to 208, respectively, viaa path PB. That is, when a through silicon via 30 x is defective, thedriver circuits 101 to 10(x−1) are connected to the receiver circuits201 to 20(x−1), respectively, via the path PA, and the driver circuits10 x to 108 are connected to the receiver circuits 20 x to 208,respectively, via the path PB.

That is, the defective through silicon via (the through silicon via 306shown in FIG. 5) is not simply replaced by the auxiliary through siliconvia (the through silicon via 309 shown in FIG. 5); however, theconnection relation among the through silicon vias 301 to 308 and thedriver circuits 101 to 108, and the connection relation among thethrough silicon vias 301 to 308 and the receiver circuits 201 to 208 areshifted with the defective through silicon via as a boundary. In thismanner, even after replacement of through silicon vias, an outputterminal of a driver circuit having a relatively larger reference numberis connected to a through silicon via having a relatively largerreference number, and an input terminal of a receiver circuit having arelatively larger reference number is connected to the through siliconvia having the relatively larger reference number. Therefore, when thethrough silicon vias 301 to 309 are arranged in this order, as far asthe i-th through silicon via and the (i+1)-th through silicon via arearranged adjacent to each other, a difference in wiring lengths almostdoes not occur between signal paths before and after replacement of thethrough silicon vias. Because almost no skew is generated due toreplacement of through silicon vias, the signal quality can be enhanced.

FIG. 6 is a circuit diagram showing in further detail a portion of theoutput switching circuit 120 shown in FIGS. 4 and 5.

As shown in FIG. 6, the output switching circuit 120 includes controlcircuit units 121 a to 128 a and switch circuit units 121 b to 128 bcorresponding to the driver circuits 101 to 108, respectively. Thecontrol circuit units 121 a to 128 a are exclusive OR (EOR) circuitsthat receive a relief signal Ri and a shift signal SHIFT (i−1). Theswitch circuit units 121 b to 128 b are controlled by selection signalsSEL1 to SEL8 output from the control circuit units 121 a to 128 a,respectively.

This is specifically explained below. The control circuit units 121 a to128 a output high level selection signals SELi when logical levels ofthe relief signal Ri and the shift signal SHIFT (i−1) differ, and theyoutput low level selection signals SELi when logical levels of therelief signal Ri and the shift signal SHIFT (i−1) are the same. Therelief signals R1 to R8 are activated to the low level whencorresponding one of the through silicon vias is defective, and they areactivated to the high level when corresponding one of the throughsilicon vias is normal. The relief signals R1 to R8 are held inreplacement control circuits 121 c to 128 c, respectively. The reliefsignals R1 to R8 are held until power is turned off. Ingenious attemptsneed to be made to reduce the number of wirings or the number of throughsilicon vias through which a relief signal is transmitted. Such attemptsinclude coding the relief signal before transmitting, transmitting therelief signal in a time multiplexing manner. When the relief signal isprocessed in this manner, the replacement control circuits 121 c to 128c have to decode the relief signal. This is why the replacement controlcircuits 121 c to 128 c are provided.

Meanwhile, shift signals SHIFT1 to SHIFT7 are inverted signals of theselection signals SEL1 to SEL7, respectively, that are output from aprevious stage control circuit unit (that is, a control circuit unithaving one reduced reference number) among the control circuit units 121a to 127 a. A logical level of a shift signal SHIFT0 that is supplied tothe control circuit unit 121 a, which is a first stage control circuitunit, is fixed to the low level (VSS).

Each of the switch circuit units 121 b to 128 b includes two transfergates that become exclusively conductive. A transfer gate on an i-ththrough silicon via side is selected when a corresponding selectionsignal SELi has the high level, and a transfer gate on an (i+1)-ththrough silicon via side is selected when a corresponding selectionsignal SELi has the low level.

In this configuration, when all of the relief signals R1 to R8 have thehigh level, that is, when all the through silicon vias 301 to 308 arenormal, all the selection signals SEL1 to SEL8 have the high level, andeach of the switch circuit units 121 b to 128 b selects the i-th throughsilicon via. Therefore, the output terminals of the driver circuits 101to 108 are connected to the through silicon vias 301 to 308 via thedriver circuits 111 to 118, respectively.

On the other hand, when one of the relief signals R1 to R8 has the lowlevel, that is, when one of the through silicon vias 301 to 308 isdefective, a selection signal SELx corresponding to the defectivethrough silicon via has the low level, and corresponding one of theswitch circuit unit 12 xb selects the (i+1)-th through silicon via.Moreover, when the selection signal SELx has the low level, because ashift signal SHIFTx has the high level, each of the switch circuit units12 (x+1)b to 128 b provided at a next stage selects the (i+1)-th throughsilicon via. In this manner, a shifting operation is realized with thedefective through silicon via as a boundary.

A combination of signals in which the shift signal is high level and therelief signal is low level is not permitted to be input. Such acombination of signals is a pattern that occurs when the number of thedefective through silicon vias exceeds the number of the auxiliarythrough silicon vias. If such a combination of signals occurs, therelief based on the auxiliary through silicon via fails.

While the circuit configuration and operations of the output switchingcircuit 120 have been explained above, the circuit configuration andoperations of the input switching circuit 220 are identical to those,and thus explanations thereof will be omitted.

FIG. 7 is a schematic diagram showing a connection relation between theinterface chip IF and the core chips CC0 to CC7.

FIG. 7 shows a case where the through silicon via 306 in the core chipCC0 among the core chips CC0 to CC7 is defective. As shown in FIG. 7,among the through silicon vias in the core chips CC0 to CC7, thecorresponding through silicon vias, that is, the through silicon viasthat have been allocated with the same reference number, are allshort-circuited. That is, when a through silicon via in one of the corechips CC0 to CC7 is defective, the corresponding through silicon vias inthe other core chips are all invalidated. In the example shown in FIG.7, because the through silicon via 306 in the core chip CC0 isdefective, the through silicon vias 306 in the other core chips CC1 toCC7 are invalidated irrespective of whether they are defective. That is,the connection relation between the through silicon vias and the drivercircuits, and the connection relation between the through silicon viasand the receiver circuits are the same in the interface chip IF and thecore chips CC0 to CC7.

FIG. 8 is a schematic circuit diagram for explaining a connectionrelation between the interface chip IF and the core chips CC0 to CC7according to a second embodiment of the present invention, and shows acase where the through silicon vias 302 and 304 are defective.

As shown in FIG. 8, in the second embodiment, two auxiliary throughsilicon vias 309 and 310 are allocated with respect to eight throughsilicon vias 301 to 308. That is, the total number of the throughsilicon vias is ten.

In the second embodiment, two output switching circuits 130 and 140 arearranged on an interface chip IF side, and two input switching circuits230 and 240 are arranged on the core chips CC0 to CC7 side. Reliefsignals R11 to R18 are supplied to the output switching circuit 130 andthe input switching circuit 230, and switching of output paths and inputpaths is performed based on these relief signals. Similarly, reliefsignals R21 to R29 are supplied to the output switching circuit 140 andthe input switching circuit 240, and switching of output paths and inputpaths is performed based on these relief signals. By providing the twooutput switching circuits 130 and 140 and the two input switchingcircuits 230 and 240, the connection relation between the throughsilicon vias 301 to 310 and the driver circuits 101 to 108, and theconnection relation between the through silicon vias 301 to 310 and thereceiver circuits 201 to 208 can be shifted by maximum two units.

Only one bit of the relief signals R11 to R18 is activated when one ortwo of the eight through silicon vias 301 to 308 are defective. When onethrough silicon via 30 x is defective, a corresponding relief signal Rxis activated, and when two through silicon vias 30 x and 30 y (x<y) aredefective, a relief signal Rx corresponding to a through silicon viahaving a relatively smaller reference number is activated. The reliefbased on the auxiliary through silicon vias according to the presentembodiment fails if three or more through silicon vias among the throughsilicon vias 301 to 308 are defective. Only one bit of the reliefsignals R21 to R29 is activated when there are two defective throughsilicon vias among the eight through silicon vias 301 to 309.Specifically, when two through silicon vias 30 x and 30 y (x<y) aredefective, a relief signal Ry corresponding to a through silicon viahaving a relatively larger reference number is activated. In thiscondition, the relief signal R21 is never activated. Therefore, alogical level of the relief signal R21 can be fixed to a non-activationlogical level. However, because it is desirable that the number oflogical steps between each of the driver circuits and each of thethrough silicon vias are equal to the number of logical steps betweeneach of the through silicon vias and each of the receiver circuits, asshown in FIG. 8, it is preferable not to omit a logical gate using therelief signal R21.

With the above configuration, when one of the eight through silicon vias301 to 308 is defective, in the same manner as the first embodiment, theproblem is solved by shifting the connection relation by one throughsilicon via with the defective through silicon via as a boundary.Further, when two through silicon vias among nine through silicon vias301 to 309 are defective, the problem is solved by, between the twodefective through silicon vias, first shifting the connection relationby one through silicon via with a defective through silicon via having arelatively smaller reference number as a boundary, and then furthershifting the connection relation by one through silicon via with adefective through silicon via having a relatively larger referencenumber as a boundary.

In the example shown in FIG. 8, two through silicon vias 302 and 304 aredefective, and thus relief signals R12 and R24 are activated. In thismanner, a shifting operation is performed first by the output switchingcircuit 130 with the through silicon via 302 as a boundary. Therefore,the output terminal of the driver circuit 102 is connected to thethrough silicon via 303. Moreover, a shifting operation is performed bythe output switching circuit 140 with the through silicon via 304 as aboundary, and therefore the output terminal of the driver circuit 103 isconnected to the through silicon via 305. The same holds true on theinput side.

FIG. 9 is a circuit diagram showing in further detail a portion of theoutput switching circuits 130 and 140 shown in FIG. 8.

As shown in FIG. 9, the output switching circuit 130 has the samecircuit configuration as the output switching circuit 120 except that itreceives the relief signals R11 to R18 instead of the relief signals R1to R8. Further, the output switching circuit 140 has the same circuitconfiguration as the output switching circuit 130 except that it isprovided at a next stage of the output switching circuit 130 and itreceives the relief signals R22 to R29. Specific circuit configurationsand operations of the output switching circuits 130 and 140 areidentical to those of the output switching circuit 120, and thereforeexplanations thereof will be omitted. Moreover, the same holds true forcircuit configurations and operations of the input switching circuits230 and 240.

As described above, in the second embodiment, the problem can be solvedeven when two through silicon vias are defective. Although not shown, aproblem caused by three or more defective through silicon vias can besolved by providing three or more auxiliary through silicon vias.

The semiconductor memory device 10 according to the preferred embodimentof the present invention will be explained below in detail.

FIG. 10 is a block diagram showing the circuit configuration of thesemiconductor memory device 10.

As shown in FIG. 10, the external terminals that are provided in theinterposer IP include clock terminals 11 a and 11 b, an clock enableterminal 11 c, command terminals 12 a to 12 e, an address terminal 13, adata input/output terminal 14, data strobe terminals 15 a and 15 b, acalibration terminal 16, and power supply terminals 17 a and 17 b. Allof the external terminals are connected to the interface chip IF and arenot directly connected to the core chips CC0 to CC7, except for thepower supply terminals 17 a and 17 b.

First, a connection relationship between the external terminals and theinterface chip IF performing the front end function and the circuitconfiguration of the interface chip IF will be described.

The clock terminals 11 a and 11 b are supplied with external clocksignals CK and /CK, respectively, and the clock enable terminal 11 c issupplied with a clock enable signal CKE. The external clock signals CKand /CK and the clock enable signal CKE are supplied to a clockgenerating circuit 21 provided in the interface chip IF. A signal where“/” is added to a head of a signal name in this specification indicatesan inversion signal of a corresponding signal or a low-active signal.Accordingly, the external clock signals CK and /CK are complementarysignals. The clock generating circuit 21 generates an internal clocksignal ICLK, and the generated internal clock signal ICLK is supplied tovarious circuit blocks in the interface chip IF and is commonly suppliedto the core chips CC0 to CC7 through the through silicon vias TSV.

A DLL circuit 22 is included in the interface chip IF and aninput/output clock signal LCLK is generated by the DLL circuit 22. Theinput/output clock signal LCLK is supplied to an input/output buffercircuit 23 included in the interface chip IF. A DLL function is used tocontrol the front end unit by using the signal LCLK synchronized with asignal of the external device, when the semiconductor memory device 10communicates with the external device. Accordingly, DLL function is notneeded for the core chips CC0 to CC7 as the back end.

The command terminals 12 a to 12 e are supplied with a row-addressstrobe signal /RAS, a column address strobe signal /CAS, a write enablesignal /WE, a chip select signal /CS, and an on-die termination signalODT. These command signals are supplied to a command input buffer 31that is provided in the interface chip IF. The command signals suppliedto the command input buffer 31 are further supplied to a command decoder32. The command decoder 32 is a circuit that holds, decodes, and countsthe command signals in synchronization with the internal clock ICLK andgenerates various internal commands ICMD. The generated internal commandICMD is supplied to the various circuit blocks in the interface chip IFand is commonly supplied to the core chips CC0 to CC7 through thethrough silicon vias TSV.

The address terminal 13 is a terminal to which address signals A0 to A15and BA0 to BA2 are supplied, and the supplied address signals A0 to A15and BA0 to BA2 are supplied to an address input buffer 41 provided inthe interface chip IF. An output of the address input buffer 41 iscommonly supplied to the core chips CC0 to CC7 through the throughsilicon vias TSV. The address signals A0 to A15 are supplied to a moderegister 42 provided in the interface chip IF, when the semiconductormemory device 10 enters a mode register set. The address signals BA0 toBA2 (bank addresses) are decoded by an address decoder (not shown in thedrawings) provided in the interface chip IF, and a bank selection signalB that is obtained by the decoding is supplied to a data latch circuit25. This is because bank selection of the write data is performed in theinterface chip IF.

The data input/output terminal 14 is used to input/output read data orwrite data DQ0 to DQ15. The data strobe terminals 15 a and 15 b areterminals that are used to input/output strobe signals DQS and /DQS. Thedata input/output terminal 14 and the data strobe terminals 15 a and 15b are connected to the input/output buffer circuit 23 provided in theinterface chip IF. The input/output buffer circuit 23 includes an inputbuffer IB and an output buffer OB, and inputs/outputs the read data orthe write data DQ0 to DQ15 and the strobe signals DQS and /DQS insynchronization with the input/output clock signal LCLK supplied fromthe DLL circuit 22. If an internal on-die termination signal IODT issupplied from the command decoder 32, the input/output buffer circuit 23causes the output buffer OB to function as a termination resistor. Animpedance code DRZQ is supplied from the calibration circuit 24 to theinput/output buffer circuit 23. Thereby, impedance of the output bufferOB is designated. The input/output buffer circuit 23 includes awell-known FIFO circuit.

The calibration circuit 24 includes a replica buffer RB that has thesame circuit configuration as the output buffer OB. If the calibrationsignal ZQ is supplied from the command decoder 32, the calibrationcircuit 24 refers to a resistance value of an external resistor (notshown in the drawings) connected to the calibration terminal 16 andperforms a calibration operation. The calibration operation is anoperation for matching the impedance of the replica buffer RB with theresistance value of the external resistor, and the obtained impedancecode DRZQ is supplied to the input/output buffer circuit 23. Thereby,the impedance of the output buffer OB is adjusted to a desired value.

The input/output buffer circuit 23 is connected to a data latch circuit25. The data latch circuit 25 includes a FIFO circuit (not shown in thedrawings) that realizes a FIFO function which operates by latencycontrol realizing the well-known DDR function and a multiplexer MUX (notshown in the drawings). The input/output buffer circuit 23 convertsparallel read data, which is supplied from the core chips CC0 to CC7,into serial read data, and converts serial write data, which is suppliedfrom the input/output buffer, into parallel write data. Accordingly, thedata latch circuit 25 and the input/output buffer circuit 23 areconnected in serial and the data latch circuit 25 and the core chips CC0to CC7 are connected in parallel. In this embodiment, each of the corechips CC0 to CC7 is the back end unit of the DDR3-type SDRAM and aprefetch number is 8 bits. The data latch circuit 25 and each banks ofthe core chips CC0 to CC7 are connected respectively, and the number ofbanks that are included in each of the core chips CC0 to CC7 is 8.Accordingly, connection of the data latch circuit 25 and the core chipsCC0 to CC7 becomes 64 bits (8 bits×8 banks) for each DQ.

Parallel data, not converted into serial data, is basically transferredbetween the data latch circuit 25 and the core chips CC0 to CC7. Thatis, in a common SDRAM (in the SDRAM, a front end unit and a back endunit are constructed in one chip), between the outside of the chip andthe SDRAM, data is input/output in serial (that is, the number of datainput/output terminals is one for each DQ). However, in the core chipsCC0 to CC7, an input/output of data between the interface chip IF andthe core chips is performed in parallel. This point is the importantdifference between the common SDRAM and the core chips CC0 to CC7.However, all of the prefetched parallel data do not need to beinput/output using the different through silicon vias TSV, and partialparallel/serial conversion may be performed in the core chips CC0 to CC7and the number of through silicon vias TSV that are needed for each DQmay be reduced. For example, all of data of 64 bits for each DQ do notneed to be input/output using the different through silicon vias TSV,and 2-bit parallel/serial conversion may be performed in the core chipsCC0 to CC7 and the number of through silicon vias TSV that are neededfor each DQ may be reduced to ½ (32).

To the data latch circuit 25, a function for enabling a test in aninterface chip unit is added. The interface chip does not have the backend unit. For this reason, the interface chip cannot be operated as asingle chip in principle. However, if the interface chip never operatesas the single chip, an operation test of the interface chip in a waferstate may not be performed. This means that the semiconductor memorydevice 10 cannot be tested in case an assembly process of the interfacechip and the plural core chips is not executed, and the interface chipis tested by testing the semiconductor memory device 10. In this case,when a defect that cannot be recovered exists in the interface chip, theentire semiconductor memory device 10 is not available. In considerationof this point, in this embodiment, a portion of a pseudo back end unitfor a test is provided in the data latch circuit 25, and a simple memoryfunction is enabled at the time of a test.

The power supply terminals 17 a and 17 b are terminals to which powersupply potentials VDD and VSS are supplied, respectively. The powersupply terminals 17 a and 17 b are connected to a power-on detectingcircuit 43 provided in the interface chip IF and are also connected tothe core chips CC0 to CC7 through the through silicon vias TSV. Thepower-on detecting circuit 43 detects the supply of power. On detectingthe supply of power, the power-on detecting circuit activates a layeraddress control circuit 45 on the interface chip IF.

The layer address control circuit 45 changes a layer address due to theI/O configuration of the semiconductor device 10 according to thepresent embodiment. As described above, the semiconductor memory device10 includes 16 data input/output terminals 14. Thereby, a maximum I/Onumber can be set to 16 bits (DQ0 to DQ15). However, the I/O number isnot fixed to 16 bits and may be set to 8 bits (DQ0 to DQ7) or 4 bits(DQ0 to DQ3). The address allocation is changed according to the I/Onumber and the layer address is also changed. The layer address controlcircuit 45 changes the address allocation according to the I/O numberand is commonly connected to the core chips CC0 to CC7 through thethrough silicon vias TSV.

The interface chip IF is also provided with a layer address settingcircuit 44. The layer address setting circuit 44 is connected to thecore chips CC0 to CC7 through the through silicon vias TSV. The layeraddress setting circuit 44 is cascade-connected to the layer addressgenerating circuit 46 of the core chips CC0 to CC7 using the throughsilicon via TSV2 of the type shown in FIG. 2B, and reads out the layeraddresses set to the core chips CC0 to CC7 at testing.

The interface chip IF is also provided with a defective chip informationholding circuit 33. When a defective core chip that does not normallyoperates is discovered after an assembly, the defective chip informationholding circuit 33 holds its chip number. The defective chip informationholding circuit 33 is connected to the core chips CC0 to CC7 through thethrough silicon vias TSV. The defective chip information holding circuit33 is connected to the core chips CC0 to CC7 while being shifted, byusing the through silicon via TSV3 of the type shown in FIG. 2C.

The interface chip IF is also provided with a relief information holdingcircuit 400. The relief information holding circuit 400 stores therelief signal described above by anti-fuse elements and the like. When adefective through silicon via is discovered by an operation test afterthe assembly, the relief signal is written in the relief informationholding circuit 400 by a tester. The relief signal held in the reliefinformation holding circuit 400 is readout when the power is turned on,and the read relief signal is transmitted to the replacement controlcircuits 121 c to 128 c in the interface chip IF and is also transmittedto the replacement control circuits in the core chips CC0 to CC7 byusing the through silicon via TSV1 of the type shown in FIG. 2A.

The above description is the outline of the connection relationshipbetween the external terminals and the interface chip IF and the circuitconfiguration of the interface chip IF. Next, the circuit configurationof the core chips CC0 to CC7 will be described.

As shown in FIG. 10, memory cell arrays 50 that are included in the corechips CC0 to CC7 performing the back end function are divided into eightbanks. A bank is a unit that can individually receive a command. Thatis, the individual banks can be independently and nonexclusivelycontrolled. From the outside of the semiconductor memory device 10, eachback can be independently accessed. For example, a part of the memorycell array 50 belonging to the bank 1 and another part of the memorycell array 50 belonging to the bank 2 are controlled nonexclusively.That is, word lines WL and bit lines BL corresponding to each banksrespectively are independently accessed at same period by differentcommands one another. For example, while the bank 1 is maintained to beactive (the word lines and the bit lines are controlled to be active),the bank 2 can be controlled to be active. However, the externalterminals (for example, plural control terminals and plural I/Oterminals) of the semiconductor memory device 10 are shared. In thememory cell array 50, the plural word lines WL and the plural bit linesBL intersect each other, and memory cells MC are disposed atintersections thereof (in FIG. 10, only one word line WL, one bit lineBL, and one memory cell MC are shown). The word line WL is selected by arow decoder 51. The bit line BL is connected to a corresponding senseamplifier SA in a sense circuit 53. The sense amplifier SA is selectedby a column decoder 52.

The row decoder 51 is controlled by a row address supplied from a rowcontrol circuit 61. The row control circuit 61 includes an addressbuffer 61 a that receives a row address supplied from the interface chipIF through the through silicon via TSV, and the row address that isbuffered by the address buffer 61 a is supplied to the row decoder 51.The address signal that is supplied through the through silicon via TSVis supplied to the row control circuit 61 through the input buffer B1.The row control circuit 61 also includes a refresh counter 61 b. When arefresh signal is issued by a control logic circuit 63, a row addressthat is indicated by the refresh counter 61 b is supplied to the rowdecoder 51.

The column decoder 52 is controlled by a column address supplied from acolumn control circuit 62. The column control circuit 62 includes anaddress buffer 62 a that receives the column address supplied from theinterface chip IF through the through silicon via TSV, and the columnaddress that is buffered by the address buffer 62 a is supplied to thecolumn decoder 52. The column control circuit 62 also includes a burstcounter 62 b that counts the burst length.

The sense amplifier SA selected by the column decoder 52 is connected tothe data control circuit 54 through some amplifiers (sub-amplifiers ordata amplifiers or the like) which are not shown in the drawings.Thereby, read data of 8 bits (=prefetch number) for each I/O (DQ) isoutput from the data control circuit 54 at reading, and write data of 8bits is input to the data control circuit 54 at writing. The datacontrol circuit 54 and the interface chip IF are connected in parallelthrough the through silicon via TSV.

The control logic circuit 63 receives an internal command ICMD suppliedfrom the interface chip IF through the through silicon via TSV andcontrols the row control circuit 61 and the column control circuit 62,based on the internal command ICMD. The control logic circuit 63 isconnected to a layer address comparing circuit (chip informationcomparing circuit) 47. The layer address comparing circuit 47 detectswhether the corresponding core chip is target of access, and thedetection is performed by comparing a SEL (chip selection information)which is a part of the address signal supplied from the interface chipIF through the through silicon via TSV and a layer address LID (chipidentification information) set to the layer address generating circuit46. When the layer address comparing circuit 47 detects a match, itactivates a match signal HIT.

In the layer address generating circuit 46, unique layer addresses areset to the core chips CC0 to CC7, respectively, at initialization. Amethod of setting the layer addresses is as follows. First, after thesemiconductor memory device 10 is initialized, a minimum value (0, 0, 0)as an initial value is set to the layer address generating circuits 46of the core chips CC0 to CC7. The layer address generating circuits 46of the core chips CC0 to CC7 are cascade-connected using the throughsilicon vias TSV of the type shown in FIG. 2B, and have incrementcircuits provided therein. The layer address (0, 0, 0) that is set tothe layer address generating circuit 46 of the core chip CC0 of theuppermost layer is transmitted to the layer address generating circuit46 of the second core chip CC1 through the through silicon via TSV andis incremented. As a result, a different layer address (0, 0, 1) isgenerated. Hereinafter, in the same way as the above case, the generatedlayer addresses are transmitted to the core chips of the lower layersand the layer address generating circuits 46 in the core chips incrementthe transmitted layer addresses. A maximum value (1, 1, 1) as a layeraddress is set to the layer address generating circuit 46 of the corechip CC7 of the lowermost layer. Thereby, the unique layer addresses areset to the core chips CC0 to CC7, respectively.

The layer address generating circuit 46 is provided with a defectivechip signal DEF supplied from the defective chip information holdingcircuit 33 of the interface chip IF, through the through silicon viaTSV. As the defective chip signal DEF is supplied to the individual corechips CC0 to CC7 using the through silicon via TSV3 of the type shown inFIG. 2C, the defective chip signals DEF can be supplied to the corechips CC0 to CC7, individually. The defective chip signal DEF isactivated when the corresponding core chip is a defective chip. When thedefective chip signal DEF is activated, the layer address generatingcircuit 46 transmits, to the core chip of the lower layer, anon-incremented layer address, not an incremented layer address. Thedefective chip signal DEF is also supplied to the control logic circuit63. When the defective chip signal DEF is activated, the control logiccircuit 63 is completely halted. Thereby, the defective core chipperforms neither read operation nor write operation, even though anaddress signal or a command signal is input from the interface chip IF.

An output of the control logic circuit 63 is also supplied to a moderegister 64. When an output of the control logic circuit 63 shows a moderegister set, the mode register 64 is updated by an address signal.Thereby, operation modes of the core chips CC0 to CC7 are set.

Each of the core chips CC0 to CC7 has an internal voltage generatingcircuit 70. The internal voltage generating circuit 70 is provided withpower supply potentials VDD and VSS. The internal voltage generatingcircuit 70 receives these power supply potentials and generates variousinternal voltages. As the internal voltages that are generated by theinternal voltage generating circuit 70, an internal voltage VPERI (≈VDD)for operation power of various peripheral circuits, an internal voltageVARY (<VDD) for an array voltage of the memory cell array 50, and aninternal voltage VPP (>VDD) for an activation potential of the word lineWL are included. In each of the core chips CC0 to CC7, a power-ondetecting circuit 71 is also provided. When the supply of power isdetected, the power-on detecting circuit 71 resets various internalcircuits.

The peripheral circuits in the core chips CC0 to CC7 operates insynchronization with the internal clock signal ICLK that is suppliedform the interface chip IF through the through silicon via TSV. Theinternal clock signal ICLK supplied through the through silicon via TSVis supplied to the various peripheral circuits through the input bufferB2.

The above description is the basic circuit configuration of the corechips CC0 to CC7. In the core chips CC0 to CC7, the front end unit foran interface with the external device is not provided. Therefore thecore chip cannot operate as a single chip in principle. However, if thecore chip never operates as the single chip, an operation test of thecore chip in a wafer state may not be performed. This means that thesemiconductor memory device 10 cannot be tested, before the interfacechip and the plural core chips are fully assembled. In other words, theindividual core chips are tested when testing the semiconductor memorydevice 10. When unrecoverable defect exists in the core chips, theentire semiconductor memory device 10 is led to be unavailable. In thisembodiment, in the core chips CC0 to CC7, a portion of a pseudo frontend unit, for testing, that includes some test pads TP and a test frontend unit of a test command decoder 65 is provided, and an address signaland test data or a command signal can be input from the test pads TP. Itis noted that the test front end unit is provided for a simple test in awafer test, and does not have all of the front end functions in theinterface chip. For example, since an operation frequency of the corechips is lower than an operation frequency of the front end unit, thetest front end unit can be simply realized with a circuit that performsa test with a low frequency.

Kinds of the test pads TP are almost the same as those of the externalterminals provided in the interposer IP. Specifically, the test padsinclude a test pad TP1 to which a clock signal is input, a test pad TP2to which an address signal is input, a test pad TP3 to which a commandsignal is input, a test pad TP4 for input/output test data, a test padTP5 for input/output a data strobe signal, and a test pad TP6 for apower supply potential.

A common external command (not decoded) is input at testing. Therefore,the test command decoder 65 is also provided in each of the core chipsCC0 to CC7. Because serial test data is input and output at testing, atest input/output circuit 55 is also provided in each of the core chipsCC0 to CC7.

This is the entire configuration of the semiconductor memory device 10.Because in the semiconductor memory device 10, the 8 core chips of 1 Gbare laminated, the semiconductor memory device 10 has a memory capacityof 8 Gb in total. Because the chip selection signal /CS is input to oneterminal (chip selection terminal), the semiconductor memory device isrecognized as a single DRAM having the memory capacity of 8 Gb, in viewof the controller.

In the semiconductor memory device 10 having the configuration mentionedabove, the relief signal held in the relief information holding circuit400 is read out when the power is turned on, and the read relief signalis transmitted to the replacement control circuits in the interface chipIF and the core chips CC0 to CC7. As explained above, in the interfacechip IF and the core chips CC0 to CC7, the defective through silicon viais not simply replaced by the auxiliary through silicon via, but thedefective through silicon via is bypassed by shifting the connectionrelation. Therefore, almost no difference in the wiring lengths occursbetween signal paths before and after replacement of the through siliconvias. Thus, because almost no skew is generated, the signal quality canbe enhanced.

It is apparent that the present invention is not limited to the aboveembodiments, but may be modified and changed without departing from thescope and spirit of the invention.

For example, in the above embodiments, a case of supplying data from theinterface chip IF to the core chips CC0 to CC7 is explained; however, inreverse, the same holds true when supplying data from the core chips CC0to CC7 to the interface chip IF. That is, it is possible to provide thedriver circuit on the core chips CC0 to CC7 side and provide thereceiver circuits on the interface chip IF side. Because the write datasupplied from the interface chip IF to the core chips CC0 to CC7 and theread data supplied from the core chips CC0 to CC7 to the interface chipIF are transmitted via the same through silicon vias, for such throughsilicon vias, both the driver circuits and the receiver circuits areprovided in each of the interface chip IF and the core chips CC0 to CC7.

For example, in the above embodiments, a chip-stacked DRAM has beenexplained as an example. However, in the present invention, the type ofsemiconductor chips to be stacked is not particularly limited thereto.It can be other memory devices such as an SRAM, a PRAM, an MRAM, anRRAM, and a flash memory, or can be a logical system device such as aCPU and a DSP.

What is claimed is:
 1. A method for bypassing a defective throughsilicon via x in a group of n adjacent through silicon vias, the methodcomprising: receiving a plurality of relief signals to identify thedefective through silicon via x; activating x−1 switch circuits toconnect x−1 data circuits to through silicon vias 1 to x−1 in the groupof n adjacent through silicon vias; activating n−x switch circuits toconnect n−x data circuits to through silicon vias x+1 to n in the groupof n adjacent through silicon vias; and activating a switch circuit toconnect a data circuit to an auxiliary through silicon via which isadjacent through silicon via n in the group of n adjacent throughsilicon vias.